Browse Prior Art Database

Scanned-Spot-Array DUV Lithography System

IP.com Disclosure Number: IPCOM000237578D
Publication Date: 2014-Jun-25

Publishing Venue

The IP.com Prior Art Database

Related People

Kenneth C. Johnson: INVENTOR

Related Documents

Zip: PATAPP

Abstract

[This is a pending patent application, which will be cross-posted at kjinnovation.com.] A DUV scanned-spot-array lithography system comprises an array of phase-Fresnel microlenses, which focus multiple radiation beams through intermediate foci at the object surface of a projection system. The intermediate foci are imaged by the projection system onto corresponding focused-radiation spots on an image plane, and the spots expose a photosensitive layer proximate the image plane as the layer is scanned in synchronization with modulation of the beams. The modulators may comprise micromechanical shutters proximate the intermediate foci for ON/OFF switching, in series with transmission grating modulators for gray-level control, and the microlenses may also be actuated to provide dynamic beam centering control. A nodal line printing technique may be used to provide ultra-high-resolution and high-throughput maskless printing capability in conjunction with multi-patterning or dual-wavelength recording processes.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 4% of the total text.

Page 01 of 69

Attorney Docket No. 75588-002764PC-910704

PATENT APPLICATION

Scanned-Spot-Array DUV Lithography System

Inventor: Kenneth C. Johnson
Residence: Santa Clara, California

Entity: Small

KILPATRICK TOWNSEND & STOCKTON LLP Two Embarcadero Center, Eighth Floor
San Francisco, California 94111-3834
Tel: 650-326-2400


Page 02 of 69

                      PATENT Attorney Docket No. 75588-002764PC-910704

Scanned-Spot-Array DUV Lithography System

Table of Contents

Cross-Reference to Related Applications .................................................................................. 1

5 Computer Program Listing Appendices .................................................................................... 2
Background of the Invention ..................................................................................................... 3
Summary of the Invention ......................................................................................................... 5
Brief Description of the Drawings ............................................................................................ 9
Description of Specific Embodiments ..................................................................................... 12

10

PART 1 ................................................................................................................................ 12
1. Overview ........................................................................................................................ 12
2. Illustrative Design Configuration ................................................................................... 14
3. Printing Process .............................................................................................................. 17
4. Optical Design ................................................................................................................ 19

15


5. The PDF Appendices and Text Files .............................................................................. 23


6. Phase-Fresnel Lenses ...................................................................................................... 24


7. Polarization Control ........................................................................................................ 28


8. The Spatial Light Modulator .......................................................................................... 29


9. Wafer Encapsulation and Alignment; Athermalization ................................................. 30

20


10. Design Variations ......................................................................................................... 31
PART 2 ................................................................................................................................ 36
11. Nodal Line Printing ...................................................................................................... 36
12. Aperture Form ................................................................................