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Droplet Stopping with Buffer Gas Debris Mitigation of EUV Source

IP.com Disclosure Number: IPCOM000238366D
Publication Date: 2014-Aug-20
Document File: 1 page(s) / 25K

Publishing Venue

The IP.com Prior Art Database

Related People

Seth Kalson: ATTORNEY

Abstract

Protection of the NI collector and other elements inside the EUV chamber from droplets reflected from the Tin Catcher (TC) when droplets are running with no plasma being generated. The result will be increased life time of the collector.

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