Browse Prior Art Database

Droplet Stopping with Buffer Gas Debris Mitigation of EUV Source Disclosure Number: IPCOM000238366D
Publication Date: 2014-Aug-20
Document File: 1 page(s) / 25K

Publishing Venue

The Prior Art Database

Related People

Seth Kalson: ATTORNEY


Protection of the NI collector and other elements inside the EUV chamber from droplets reflected from the Tin Catcher (TC) when droplets are running with no plasma being generated. The result will be increased life time of the collector.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 01 of 1