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An Algorithm for Fin Length Augmentation from Pre-Existing Design Data

IP.com Disclosure Number: IPCOM000240147D
Publication Date: 2015-Jan-06
Document File: 3 page(s) / 321K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is an algorithm to transform an existing set of shapes representing fins into another set of shapes for which the fin length is increased, while leaving the overall circuit operation unchanged – at the expense of increased leakage current.

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Page 01 of 3

An Algorithm for Fin Length Augmentation from Pre -

In technologies using fin, uniaxial strain significantly contributes to device performance. However, cutting the fin during the process relaxes the strain near the location where the fin is cut. Maintaining strain along areas of the fin where transistors are made is important. Manually changing an existing layout design with this added consideration can be challenging and unnecessary, especially later in the design cycle.

The novel contribution is an algorithm to transform an existing set of shapes representing fins into another set of shapes for which the fin length is increased , while leaving the overall circuit operation unchanged - at the expense of increased leakage current.

Figure 1: Initial design - including RX, RXFIN, PC, CT, M1

Figure 2: Initial design - after standard Boolean operations to generate fins and cut PC lines

Average fin length (# of CPPs): 2.9

Figure 3: Step 1: Creation of additional fin shapes (shown in green)

-Existing Design Data

Existing Design Data

1


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For each FIN shape in design:


• If FIN shape exists 1 CPP to the right of FIN and no FIN shape immediately to the right of FIN: ADD FIN SHAPE of length 1 CPP to right of FIN


• If FIN shape exists 1 CPP to the left of FIN and no FIN shape immediately to the left of FIN: ADD FIN SHAPE of length 1 CPP to left of FIN

Figure 4: Fin count after Step 1

Average fin length (# of CPPs): 8.3

Figure 5: Step 2: Place gate contacts o...