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Multiple Member EUV Pellicle Packaging Assembly

IP.com Disclosure Number: IPCOM000240771D
Publication Date: 2015-Feb-27
Document File: 5 page(s) / 78K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a reliable method to safely transport/ship un-mounted Extreme Ultraviolet (EUV) pellicle samples to prevent breakage. The novel structure consists of a top protective dummy cover and a bottom protective dummy cover sandwiching the un-mounted framed EUV pellicle.

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Multiple Member EUV Pellicle Packaging Assembly

Transport/shipping of Extreme Ultraviolet (EUV) pellicle from pellicle manufacturer to customer (e.g., maskhouse) is required for mounting on EUV photomask. EUV pellicle samples consist of unsupported membranes that are fragile and sensitive to mechanical shocks, (e.g. ultrathin (50-500nm) Silicon Membrane with squared silicon frame (up to 5 x 5 inch)).

Current solutions combine the EUV mask and the EUV pellicle and usually contain fixtures (e.g., magnets, glues) that are permanently affixed to the pellicle frame or mask substrate and are not designed for easy removal. No attention has been given to shipment of un-mounted EUV pellicles from EUV pellicle supplier site to maskhouse for mounting on EUV reticle.

A simple, cost effective, and reliable method is required to safely transport/ship un-mounted EUV pellicle samples to prevent breakage.

The novel solution is a method to use a structure consisting of a top protective dummy cover and a bottom protective dummy cover sandwiching the un-mounted framed EUV pellicle; each cover is separated from the un-mounted framed EUV pellicle by temporarily affixed magnetic spacers that hold the entire structure together. The structure can be easily assembled/disassembled using a pair of tweezers. The entire assembly can be packaged in a commercial membrane suspension box.

The multiple member EUV pellicle packaging assembly comprises:


• A first bottom assembly member adapted to...