Browse Prior Art Database

Sensor Arrangement

IP.com Disclosure Number: IPCOM000240787D
Publication Date: 2015-Mar-02

Publishing Venue

The IP.com Prior Art Database

Abstract

A sensor arrangement comprises a sensor chip. The sensor chip comprises a sensor sensitive to a variable to be measured. The sensor provides a sensor signal. The sensor chip further comprises a stress sensor sensitive to stress in the sensor chip. The stress sensor provides a stress signal. A compensator of the sensor arrangement is configured to determine a stress compensated sensor signal dependent on the sensor signal and the stress signal.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 8% of the total text.

Page 01 of 23

SENSOR ARRANGEMENT

ABSTRACT

          A sensor arrangement comprises a sensor chip. The
sensor chip comprises a sensor sensitive to a variable to be
measured. The sensor provides a sensor signal. The sensor chip
further comprises a stress sensor sensitive to stress in the
sensor chip. The stress sensor provides a stress signal. A
compensator of the sensor arrangement is configured to deter-
mine a stress compensated sensor signal dependent on the sen-
sor signal and the stress signal.

FIELD OF THE INVENTION

          The present invention relates to a sensor arrange-
ment and to a method for operating a sensor arrangement com-
prising a sensor chip.

BACKGROUND OF THE INVENTION

          Pressure sensors and methods of manufacturing pres-
sure sensors are known. In pressure sensors the membrane may
be sensitive to stress. Sensitive elements of other sensors
may also be sensitive to stress. When such sensor is mounted
to a carrier and is electrically connected thereto mechanical
stress may be evoked and transmitted via electrical contacts
or via mechanical joining elements to such stress sensitive
elements of the respective sensor.

SUMMARY OF THE INVENTION

          Hence, according to a first aspect of the inven-
tion, there is provided a sensor arrangement comprising a sen-
sor chip and a compensator. The sensor chip comprises a sensor
sensitive to a variable to be measured. Such variable may be,
for example, one of pressure, flow of a gas, flow of a liquid,


Page 02 of 23

humidity, gas or temperature. For this purpose, the sensor
comprises one or more elements sensitive to the variable. In
addition, the sensor embodied in the sensor chip may comprise
sensing means for determining a property of the sensitive ele-
ment which property is representative of the variable to be
measured, and / or for converting such property into an elec-
trical signal, which signal is also referred to as sensor sig-
nal. For example, in a pressure sensor chip the variable to be
measured is pressure, the sensitive element preferably is a
suspended membrane integrated into the sensor chip which mem-
brane deflects in response to pressure applied, and the sens-
ing means includes two electrodes, a stationary one and anoth-
er one coupled to or being integral in the suspended membrane
for measuring a capacitance there between. The capacitance de-
pends on a distance between the electrodes, and therefore de-
pends on the pressure that deflects the membrane.

          The sensor chip further includes a stress sensor
sensitive to stress in the sensor chip. Stress in a three-
dimensional element may in general be described by means of a
temperature dependent tensor. In the present context of meas-
uring stress, it is understood that not necessarily all compo-
nents of a stress tensor are measured, but, for example, one
component, or, in another example, two or more components.
Such component may, for example, include stress normal to a
surface such as tension or compression stress, or shear
stress, or torsion stress. The stress sensor supplies a stres...