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Compression resistant pressure sensitive adhesives as attachment systems for fixed abrasives, slurry and chemical mechanical finishing applications

IP.com Disclosure Number: IPCOM000240826D
Publication Date: 2015-Mar-05
Document File: 4 page(s) / 362K

Publishing Venue

The IP.com Prior Art Database

Abstract

Article proposes load bearing particles or structures to maintain PSA thickness uniformity under continued load

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 61% of the total text.

Page 01 of 4

Compression resistant pressure sensitive adhesives as attachment systems for fixed abrasives, slurry and  chemical mechanical finishing applications 
 

Background 
 
Pressure sensitive adhesives, psa's, are inherently susceptible to compression under load.   This  phenomenon is problematic when a psa is used in conjunction with grinding, lapping or polishing as an  attachment system.   The problem can exist with fixed abrasive, slurry systems or chemical mechanical  polishing.   When the load on the workpiece is too great a deformation can take place at the surface in  contact with the workpiece due to the compliance of the underlying psa.    The detrimental effect can  result in a non planar finishing of the workpiece.    This is often referred to as dishing, edge roll off,  rounding or crown, Figure 1. 
 
 

Figure 1:   A workpiece with the underlying abrasive, fixed or slurry, plastic film or substrate, pressure  sensitive adhesive and platen and the system with applied load. 
 

 


Page 02 of 4

Solutions to this problem include adding load bearing features to the pressure sensitive adhesive layer  or the surface adjacent to the psa.   This prevents the deformation of the polishing surface due to  deformation of the pressure sensitive adhesive layer.  Load bearin...