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Automated 300mm Optical Kerf Library Macros Generation Process by using Tabular Input Index

IP.com Disclosure Number: IPCOM000241986D
Publication Date: 2015-Jun-11
Document File: 5 page(s) / 482K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a streamlined process that enables the Optical Kerf team to release the Optical Kerf Library across different technology nodes and test sites in an automated and time-efficient way. The streamlined process enables the macro owner to define macro specifications in a tabular input index, which is critical to generating 300mm Optical Kerf macros.

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Automated 300mm Optical Kerf Library Macros Generation Process by using Tabular Input Index

Optical Kerf Library macros of 300mm are critical elements for optical proximity alignment of Kerf to ensure that test site chips are aligned before dicing or alignment check. As technology nodes move into a more advanced nm scale range, more masks are required and Generic Requirements (GR) complication increases.

Designing with more mask sets and more complicated GR values for Optical Kerf macros is a challenge for both designers and owners in a busy design cycle. This situation is expected to continue as process technology moves into more advanced nodes. Technology churn, re-learning, and late learning from a previous test site or technology also pose challenges for designing these macros on time.

Figure 1: Flow diagram of old business process

The novel contribution is a streamlined process that enables the Optical Kerf team to release the Optical Kerf Library across different technology nodes and test sites in an automated and time-efficient way. The streamlined process enables the macro owner to define macro specifications in a tabular input index, which is critical to generating 300mm Optical Kerf macros.

This new automated business process uses streamlined input specification in tabular format to reduce any miscommunication, churn, etc. between macro owners and designers. Per Kerf macro, dedicated Kerf pcells and macro builders are implemented to handle specific macros. This new business process can continue to grow as more implementations of new Kerf macros are added; it is expandable. In addition, the newprocess is technology independent; therefore, it is portable and can be easily migrated from one technology into a more advanced node once implementation of kerf macro build system is ready.

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The tabular input index can be compromised with GR values, specific kerf levels, Boolean operation (e.g., positive/negative tone), etc. This new business process allows designers to release an optical kerf library for any technology with constant support of optical kerf pcells. An auto-generati...