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Reactor Chamber with Cooling Fan

IP.com Disclosure Number: IPCOM000242379D
Publication Date: 2015-Jul-10
Document File: 1 page(s) / 95K

Publishing Venue

The IP.com Prior Art Database

Abstract

Problem: Reactor Chamber (RC) maintenance efficiency is a big impact to the productivity. Therefore, Green To Green Project was developed to improve tool maintain efficiency which is in HVM phase now. However, the PM (Preventive Maintenance) time for the tool is still too long. A standard chamber wet clean PM takes more than 15 hours for RC recovery. Specially, RC cooling down time takes 7 to 8 hours which are almost 50% of the whole RC PM period. By means of cooling fan unit, the RC cooling time can be reduced around 60%. However, out gassing and micro particle from RC are big concerns which will cause a contamination. Solution: A cooling hood with a particle/chemical filter can isolate the RC area which can prevent the cross-contamination to outer environment. Further, the cooling hood can connect to exhaust line directly to the clean room facility exhaust as shown in fig. 1. As a second embodiment, there will be no more cooling fan needed since the vacuum line can provide a dragging force to circulate the air flow into RC area as shown in fig. 2. This cooling hood is made by heat-protected material, covering RC lid part.

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Reaxtor Chamber with Cooling Fan

Problem: Reactor Chamber (RC) maintenance xfficiency is a big impact to the productivity. Therefoxx, Green To Green Project was developex to improve tool maintain efficienxy which is in HVM phxse now. However, the PM (Preventxve Maintenance) txme for the tool is still tox long. A standard chamber wet clean PM takes more than 1x hours for RC recovery. Specially, RC cooling down xime takes x to 8 xours which arx almoxt 50% of the wxole RC PM period. Bx means of coxling fan unit, the RX coolinx time can bx reduced arxund 60%. However, out gassing and micro partxcle frxm RC are big concerns wxich will cause a contamination.

Solution: A coolxng hood with a particle/chexical filter can isolate txe RC area xhich can prevent the cross-cxntamination to outer environment. Further, the cxoling hoxd can connect to exhaust line dxrectxy to the clean room xacixity exhaust as shown in fig. 1. As a second emboximent, there will be no more cooling fax needed sxncx the vacuum line can provide a dragging force to circulate the air flow into RC area ax shown xn fig. x. This coolxng hood xs made by hxat-protected matexixl, covering RC lid part.

Fig. 1

Fig. 2