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Feedback system for RF Attenuation

IP.com Disclosure Number: IPCOM000243848D
Publication Date: 2015-Oct-21
Document File: 3 page(s) / 156K

Publishing Venue

The IP.com Prior Art Database

Abstract

Problem Length of RF coaxial cable depends on each tools which causes the different attenuation rate Therefore user needs to set Fwd power that compensates the difference in advance Further user needs to make recipes having Fwd power which corresponds to the attenuation rate Solution Develop software having the following function 1 Create a table that lists attenuation ratio depending on cable length 2 Read specified data of two cable lengths One is data of standard cable The other is cable which will be used actually 3 Add attenuation ratio to Fwd power of a recipe and feedback that value to the output power automatically

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Page 01 of 3

Problem:

Length of RF coaxial cable depends on each tools, which causes the different attenuation rate. Therefore, user needs to set Fwd power that compensates the difference in advance. Further, user needs to make recipes having Fwd power, which corresponds to the attenuation rate.

Solution:

Develop software having the following function:

1. Create a table that lists attenuation ratio depending on cable length.

2. Read specified data of two cable lengths. One is data of standard cable. The other is cable, which will be used actually.

3. Add attenuation ratio to Fwd power of a recipe and feedback that value to the output power automatically.

Drawings

Prior art

Example: In the case of using different cable of length.

The length of RF coaxial cable in site A is 15m.

The length of RF coaxial cable in site B is 22m.

When Fwd settings in site B is 100W, to achieve deposition as same condition as site A, an operator need to add data as below to 100W.

100W * (attenuation rate A - attenuation rate B) = 100 * (0.9268 - 0.8945) = 32.3W

In other words, recipe settings should be modified to 132.3W from 100W on RF ON step.


Page 02 of 3

Their RF cables are different in length.

Tool A

Tool B

レシピ A1

レシピ A1

Recipe A1

Recipes need to be modified. (Settings of RF Forward)

レシピ A1

レシピ A1

Recipe B1

Fig.1

Invention

Input basic data of cable length and actual data of cable length to automatic feedback software.
Fwd outputs are updated automatically without modif...