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Method of Reducing Capacitance around Upper Electrode

IP.com Disclosure Number: IPCOM000245176D
Publication Date: 2016-Feb-17
Document File: 1 page(s) / 30K

Publishing Venue

The IP.com Prior Art Database

Abstract

Problem: Generally, PECVD and PEALD tool use aluminum for upper electrode and most of parts around the upper electrode. This causes abnormal discharge, resulting in a particle issue.

Solution: Uses ceramic for parts between the upper electrode and gate valve mounted above the upper electrode.

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1. Problem

Generally, PECVD and PEALD tool use aluminum for upper electrode and most of parts around the upper electrode. This causes abnormal discharge, resulting in a particle issue.


2. Solution

Uses ceramic for parts between the upper electrode and gate valve mounted above the upper electrode.