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A method to quantify the violation or preservation of Poisson Area Scaling Statistics for dielectric breakdown

IP.com Disclosure Number: IPCOM000246633D
Publication Date: 2016-Jun-23
Document File: 2 page(s) / 46K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method to quantify the violation or preservation of Poisson area scaling. This includes mathematical solution for acceptable samples that follow Poisson area scaling as well as a method to establish quantitative criteria for the acceptable common in-die (in-chiplet) beta approach.

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A method to quantify the violation or preservation of Poisson Area Scaling Statistics for dielectric breakdown

A system or method is needed to quantify the violation or preservation of Poisson area-scaling statistics to enable the verification of the validity of a given qualification method or to select good samples to meet the qualification target. This need includes a method to select the samples following Poisson area scaling to construct an intrinsic BD statistical parameter and a method to ensure the validity of assumptions used in

common in-die or in-chiplet approach.

Current methodologies are time-consuming and tedious and offer only visual displays

without quantitative information.

The disclosed solution is a method for separately defining and measuring beta index and area-scaling index (eta) and constructing beta-vs.-eta correspondence plots compared to one-to-one correspondence with the suitable boundaries based on statistical fluctuation consideration.

The novel idea is to:

• Separately define beta-index, and area-scaling index, • Construct the boundaries of vs. for sample size and the desired confidence bound • Compare with the boundary for the given sample sizes
• Obtain the acceptable samples

Figure: Process flow

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