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Tuning Fork Density and Viscosity Sensor with Electrodes Made by ION Implantation

IP.com Disclosure Number: IPCOM000247039D
Publication Date: 2016-Jul-28
Document File: 1 page(s) / 4K

Publishing Venue

The IP.com Prior Art Database

Abstract

Currently, our tuning fork Density-Viscosity Sensor is made of a sandwich structure with Lithium niobate layers on the top and bottom, which are bonded by an amorphous silica layer. When immersed in the hot water at high pressure, the water attacks the exposed silica bonding layer (seam) on the edge and eventually reaches and then corrodes the internal metal electrodes.

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Title:  Tuning Fork Density and Viscosity Sensor with Electrodes Made by ION Implantation

Abstract:  Currently, our tuning fork Density-Viscosity Sensor is made of a sandwich structure with Lithium niobate layers on the top and bottom, which are bonded by an amorphous silica layer. When immersed in the hot water at high pressure, the water attacks the exposed silica bonding layer (seam) on the edge and eventually reaches and then corrodes the internal metal electrodes.

Description:  We can use ion implantation method to inject positive ions (or negative ions) into the lithium niobate substrate. The ions are implanted at a depth between0.5 and 2 micrometer in the lithium niobate. Masks are used so that the implanted ions form a pattern similar to the electrodes in the embedded tuning fork. The structural damage resulting from the process of ion implantation creates enough damage into the lithium niobate that increases the electrical conductivity in the damaged zones. Because these conductive zones are now internal to the lithium niobate tunning fork, they are not subject to attack by the liquid phase where the tuning for is immersed..