Browse Prior Art Database

Fluorochemical coating for spinner cup equipment

IP.com Disclosure Number: IPCOM000249080D
Publication Date: 2017-Feb-02
Document File: 3 page(s) / 413K

Publishing Venue

The IP.com Prior Art Database

Abstract

This paper describes the use of fluorochemical anti-smudge coatings in photoresist (PR) spinner equipment. Electronic grade fluorosilane coatings, due to their anti-smudge performance, are shown to reduce contamination of the spinner cup during the PR spinning deposition process. The time between replacements of the spinner cup is increased, therefore simplifying spinner equipment maintenance.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Fluorochemical coating for spinner cup equipment This paper describes the use of fluorochemical anti-smudge coatings in photoresist (PR) spinner equipment. Electronic grade fluorosilane coatings, due to their anti-smudge performance, are shown to reduce contamination of the spinner cup during the PR spinning deposition process. The time between replacements of the spinner cup is increased, therefore simplifying spinner equipment maintenance.

Test conditions  Coating product : Electronic grade anti-smudge fluorosilane coating  Coating method : Dipping & Spraying  Coating Substrate : Polypropylene (PR cup material), SUS (Reference)  Substrate uniformity inspection: Substrate uniformity analysis for reducing contact angle analysis

error  Coating layer analysis method : Contact angle measurement using a Drop Shape Analyzer

(DSA100 from KRUSS)

Contact angle analysis result  PP test result

SUS test result

Surface uniformity inspection result  PP test result

 SUS test result

Conclusion

 After coating, contact angle is increased

(PP substrate – approx. 2 times, SUS substrate – approx. 3.5 times)  Contact angle of dip coating is higher than spray coating method.

 Substrate uniformity variation within 0.5㎛ -There would be no contact angle analysis error.