Hybrid Nanostructured Ion-Sensitive Field-Effect Transistor
Publication Date: 2017-Feb-22
The IP.com Prior Art Database
Disclosed is a hybrid organic/inorganic bio-sensor having a nanostructured channel and fabrication method, where in some embodiments the said nanostructures are sublithographic.
Hybrid Nanostructured Ion -Sensitive Field -Effect Transistor
Organic materials offer several advantages for bio -sensing applications, including bio-responsiveness, bio-compatibility, versatility, low-cost/low-temperature processing, softness, and ease of electrical interfacing with the biological matter . However, organic bio-sensor devices have two drawbacks: (i) degradation of the organic material as a result of exposure to the biological matter and (ii) the realization of active sensors requires integration with transistors, but the performance of organic transistors may not be satisfactory for signal processing.
Current art shows a hybrid organic/inorganic bio-sensor, which combines the advantages of organic materials in bio-sensing, with the high performance of inorganic devices. The bio-sensor is comprised of an ion-sensitive field-effect transistor (ISFET), wherein the channel is comprised of an inorganic semiconductor (e.g., Silicon (Si)) and the gate junction is comprised of organic materials . The organic material may include a self-assembled mono-layer in direct contact with the inorganic semiconductor . The hybrid biosensor may also include a back-gate, disposed on an opposite surface of the said semiconductor channel. The hybrid biosensor may have a higher sensitivity than a conventional ISFET due to the elimination of the gate dielectric . Nevertheless, the sensitivity limitations inherent to planar (flat) sensor surfaces apply to the disclosed hybrid sensor.
Disclosed is a hybrid organic/inorganic bio-sensor having a nanostructured channel and fabrication method, where in some embodiments the said nanostructures are sublithographic. The disclosed nano-structures increase the surface-to-volume ratio of the sensor and therefore the sensitivity of the biosensor compared to a flat sensor surface. The sensor is comprised of inorganic semiconductor nano -channels disposed between a source and a drain on an insulating substrate , wherein the surface of the inorganic nano-channels is passivated by an organic...