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A Systematic Approach to Enable Mask Respin in OPC Flows

IP.com Disclosure Number: IPCOM000249803D
Publication Date: 2017-Apr-06
Document File: 5 page(s) / 124K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a systematic approach to enable mask respin in OPC flows.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 54% of the total text.

Title A Systematic Approach to Enable Mask Respin in OPC Flows Abstract Disclosed is a systematic approach to enable mask respin in OPC flows. Problem Back-end-of-line (BEOL) layers are interdependent in terms of retargeting and optical proximity correction (OPC). If a manufacturer receives BEOL respin requests from a customer, then the manufacturer must determine how it affects the layers above/below the layers that need respin. Figure 1: Respin concept: Customer decides to change the design of some BEOL layers, Li till Ln, etc.

Figure 2: BEOL layers are interdependent

 Via retargeting is based on upper/lower metal targets  Metal layers have coverage/enclosure optical rule check (ORC) of via layers  Via layers have bridging checks to metal layers

Figure 3: Other layers respin Li-1, Ln+1?

To answer this question, a method is needed to:

 Run special ORC tech files mixing AZ & BZ inputs  Establish logical xor operation (XOR) for old mask (AZ) and new mask (BZ) table

driven layer operation (TDLO) layouts Each BEOL ORC tech file should have two extra variables that are set to 0 by default.

 RESPIN_LB  re-spin layer below  RESPIN_LA  re-spin layer above

If any of these variable is set to 1, then the corresponding TDLO required layers are passed to ORC. This is not to be confused with metal layers reading below via layers Figure 4: ORC to enable re-spin

No solid methodology is available for determining whether the manufacturer needs to respin layers above/below. The following needs to change:

 Same engineering change notice/engineering change notice (ECN/TECN) used for AZ should be used...