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New ORC2CFM Flow with Optimized Weak Point Selection

IP.com Disclosure Number: IPCOM000249842D
Publication Date: 2017-Apr-14
Document File: 6 page(s) / 350K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a new optical rule check to contamination free manufacturing (ORC2CFM) flow that optimizes the optical rule check (ORC) weak point (WP) selection. The idea is to output duplicate weak points at four corners and center for the CFM team to scan. This ensures that users do not misjudge the process window due to big within-die CD variation.

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Title New ORC2CFM Flow with Optimized Weak Point Selection Abstract Disclosed is a new optical rule check to contamination free manufacturing (ORC2CFM) flow that optimizes the optical rule check (ORC) weak point (WP) selection. The idea is to output duplicate weak points at four corners and centerfor the CFM team to scan. This ensures that users do not misjudge the process window due to big within-die CD variation. Problem The current ORC2CFM flow does not consider the critical dimension (CD) variation within die. However, recent work shows variation as large as 7nm within die. A new flow is needed to solve this problem. Figure 1: Old Orc2Cfm weak point generation flow

Solution/Novel Contribution The novel solution is a new ORC2CFM flow that optimizes the ORC weak point (WP) selection. The idea is to output duplicate weak points at four corners and centerfor the CFM team to scan. This ensures that users do not misjudge the process window due to big within-die CD variation. The new flow includes both ORC errors and warnings. It optimizes the selection of weak points to approach the real process window. The new flow adds one new output to the diagnose team (orc.diag.rdb). Method/Process The first step is to modify the optical proximity correction (OPC) keyword that could output the duplicate weak points instead of single one. To activate this, the method uses the newly developed function of Mentor ORC code, "keep duplicates worst unique 5000 per_class 500". The method adds this line to every weak point layer to produce an output of both unique errors and its duplicates. The process only outputs up to 5000 of the worst kinds of unique errors, each with up to 500 duplicate errors. The next step is to filter those weak points across the die and select the weak points in four corners and one center. The algorithm is:

1. Calculate the x coordinate plus y coordinate (x-y) of one type of weak point. The minimum (Min(x+y)) will be the bottom left one and the maximum (Max(x+y)) will be the top right weak point.

2. Calculate the x coordinate minus y coordinate (x-y) of the rest of the weak point. The minimum one (Min(x-y)) will be...