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HIGH SPEED AND SPACE OPTIMIZED STOCKER SYSTEMS FOR FRONT OPENING UNIFIED PODS (FOUPS)

IP.com Disclosure Number: IPCOM000004613D
Original Publication Date: 2001-Feb-28
Included in the Prior Art Database: 2001-Feb-28

Publishing Venue

Motorola

Related People

Authors:
Tobias Eidmann Tim Stanley

Abstract

HIGH SPEED AND SPACE OPTIMIZED STOCKER SYSTEMS FOR FRONT OPENING UNIFIED PODS (FOUPS)