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A METHOD FOR INSITU DETECTION OF PLANARIZATION IN CHEMICAL MECHANICAL POLISHING

IP.com Disclosure Number: IPCOM000004653D
Original Publication Date: 2001-Mar-19
Included in the Prior Art Database: 2001-Mar-19

Publishing Venue

Motorola

Related People

Authors:
Thomas Kobayashi Charles Stager

Related Documents

Patent/Patent Application:

Abstract

A METHOD FOR INSITU DETECTION OF PLANARIZATION IN CHEMICAL MECHANICAL POLISHING