High productivity no-load inline dimensional inspection device
Disclosed is a design for a high productivity no-load inline dimensional inspection device. Benefits include a method for accurately measuring the distance between two planes on the same side of the component.
The disclosed design is an effective, accurate measurement device developed for in-line measurement of critical parameters during high-volume manufacturing (HVM) production. This device meets the requirement to test 100% of the thermal transfer plate (TTP) component to ensure the quality of the package assembled state, which directly effects processor performance.
Measurement device accuracy of 1 µm, repeatability of 15% (with a tolerance range of 52 gm), and reproducibility of 30% is required. Conventional industry methods and devices do not meet all of these requirements.
The metrology design objective is to measure the distance between two planes on the same side of the component. The force applied to the component during measurement must be equivalent to that exerted during package assembly operation resulting in a functional measurement.
The device consists of two sets of probes that are calibrated to a 0-reference plane. The first set creates a best-fit plane using three or more fixed probes contacting the component reference surface (see Figure 1). The second plane is created using three or more floating probes contacting the part-measurement surface. Software takes data from these probes to create a best-fit plane and then determines the distance between both planes and/or the individual contact points. The developed measurement device has cycle time of less than 1.33 seconds, an accuracy of 0.17 gm, a repeatability of 3.3%, and reproducibility of 6.3% (see Figures 2-19).
Fig. 1
Moments
Mean
2.60780
Std Dev
0.00017
Std Error Mean
0.00004
Upper 95% Mean
2.60789
Lower 95% Mean
2.60771
N
16.00000
Sum Weights
16.0000
Fig. 2
Quantiles
Maximum
100.0%
2.6197
99.5%
2.6197
97.5%
2.6197
90.0%
2.6196
Quartile
75.0%
2.6194
Median
50.0%
2.6193
Quartile
25.0%
2.6192
10.0%
2.6188
2.5%
2.6184
0.5%
2.6184
Minimum
0.0%
2.6184
Moments
Mean
2.61925
Std Dev
0.00029
Std Error Mean
0.00005
Upper 95% Mean
2.61936
Lower 95% Mean
2.61914
N
30.00000
Sum Weights
30.0000
Fig. 3
Fig. 4
Oneway Anova
Summary of Fit
RSquare
0.446148
RSquare Adj
0.435497
Root Mean Square Error
0.002724
Mean of Response
2.476421
Observations (or Sum Wgts)
160
Analysis of Variance
Source
DF
Sum ...
