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INDIVIDUAL LOT LOAD FURNACE FOR EFFICIENT SEMICONDUCTOR PRODUCTION

IP.com Disclosure Number: IPCOM000004709D
Original Publication Date: 2001-Apr-16
Included in the Prior Art Database: 2001-Apr-16

Publishing Venue

Motorola

Related People

Authors:
Tim Stanley Terry Breeden Mike Tucker

Abstract

INDIVIDUAL LOT LOAD FURNACE FOR EFFICIENT SEMICONDUCTOR PRODUCTION