THIN FILM MICROFABRICATED HYDROGEN ION SOURCES
Original Publication Date: 2001-Apr-20
Included in the Prior Art Database: 2001-Apr-20
Related DocumentsPatent/Patent Application: Other References:
The concept of a thin film hydrogen ion source integrating field emission cathode arrays with metal hydride thin film technology is proposed. A prototype hydrogen ion source was fabricated using Mo field emitter arrays with titanium hydride thin films, and the emission characteristics of the device were demonstrated.