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Browse Prior Art Database

THIN FILM MICROFABRICATED HYDROGEN ION SOURCES

IP.com Disclosure Number: IPCOM000004722D
Original Publication Date: 2001-Apr-20
Included in the Prior Art Database: 2001-Apr-20

Publishing Venue

Motorola

Related People

Authors:
Babu R. Chalamala Robert H. Reuss

Related Documents

Patent/Patent Application: Other References:
M.V.C. Sastri, B. Viswanathan and S. Srinivasa Murthy, Metal Hydrides: Fundamentals and Applications, Springer-Verlag, New York, 1998. - OTHER H. Chatbi, M. Vergnat, and G. Marchal, Appl. Phys. Lett. 64, 1210 (1994). - OTHER

Abstract

The concept of a thin film hydrogen ion source integrating field emission cathode arrays with metal hydride thin film technology is proposed. A prototype hydrogen ion source was fabricated using Mo field emitter arrays with titanium hydride thin films, and the emission characteristics of the device were demonstrated.