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END EFFECTOR IMPROVEMENTS FOR INCREASING WAFER TRANSFER EFFICIENCY

IP.com Disclosure Number: IPCOM000004776D
Original Publication Date: 2001-May-16
Included in the Prior Art Database: 2001-May-16

Publishing Venue

Motorola

Related People

Authors:
Karl E. Mautz Clint Haris

Abstract

END EFFECTOR IMPROVEMENTS FOR INCREASING WAFER TRANSFER EFFICIENCY