MASK GRATING DUTY FACTOR METER
Original Publication Date: 1980-Aug-01
Included in the Prior Art Database: 2001-Oct-10
An accurate and convenient system for measuring the duty factor of periodic space patterns in sur- face acoustic wave devices and photomasks has been conceived and developed. The measurement technique, which reduces a tedious task to a simple light intensity measurement, is based on the energy distribution in the light beams diffracted by a periodic grating. A laboratory version of the system is described.