Browse Prior Art Database

PELLICLE MASK PROTECTION FOR I:1 PROJECTION ALIGNERS

IP.com Disclosure Number: IPCOM000005448D
Original Publication Date: 1982-Jan-01
Included in the Prior Art Database: 2001-Oct-10

Publishing Venue

Motorola

Related People

Authors:
John Lent

Abstract

One major problem associated with 1:l projection printing is defects caused by airborne COntamina- hon. This contamination problem becomes more serious as the printed geometries become Smaller, especially as the ratio of geometry area versus particulate area approaches 1. Unfortunately, the smaller particulates are harder to see and remove.