PELLICLE MASK PROTECTION FOR I:1 PROJECTION ALIGNERS
Original Publication Date: 1982-Jan-01
Included in the Prior Art Database: 2001-Oct-10
One major problem associated with 1:l projection printing is defects caused by airborne COntamina- hon. This contamination problem becomes more serious as the printed geometries become Smaller, especially as the ratio of geometry area versus particulate area approaches 1. Unfortunately, the smaller particulates are harder to see and remove.