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METHOD OF REDUCING ALKALI CONTAMINATION IN OXIDE FILMS FROM PLASMA PROCESSING STEPS

IP.com Disclosure Number: IPCOM000005575D
Original Publication Date: 2001-Oct-16
Included in the Prior Art Database: 2001-Oct-16

Publishing Venue

Motorola

Related People

Authors:
Karl E. Mautz

Abstract

METHOD OF REDUCING ALKALI CONTAMINATION IN OXIDE FILMS FROM PLASMA PROCESSING STEPS