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Disclosed is a method for an angled blade trench in a scribe to stop crack propagation from saw kerf. Benefits include improved saw quality and improved copper cut quality.
English (United States)
This text was extracted from a Microsoft Word document.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately
71% of the total text.
Method for an angled blade trench in a scribe to stop crack
propagation from saw kerf
Disclosed is a method for an angled blade trench in a scribe to
stop crack propagation from saw kerf. Benefits include improved saw quality and
improved copper cut quality.
devices with low mechanical adhesion layers results in delamination of the
device due to blade loading with ductile copper at the contact surface.
dicing processes use straight blades with varying angled tips producing a
contact angle of less than or equal to 90 degrees. These blades are used on a
spindle to place cuts partially into the wafer for stress relief or completely
through the wafer for die separation.
method includes the use of a low-angled blade to cut a trench into a scribe
using the same spindle as the separation blades.
On a dual-spindle
saw, the angled blades concept can best be applied by placing two angled
blades, facing opposite directions on the first spindle (see Figure 1). These
blades cut the trench in the scribe (see Figure 2). The second spindle has a
single blade that separates the devices. An alternative approach using three
blades on the first spindle can be used in cases where the first spindle is currently
used with a different blade in a series configuration. In this application, the
first spindle would have the existing blade between the two angled blades .
Hubless blades may be required to enable two or three blades on the s...