EDGE ROUGHNESS DETECTOR FOR SEMICONDUCTOR WAFERS
Original Publication Date: 1988-Oct-01
Included in the Prior Art Database: 2001-Oct-30
This device detects local rough spots in a semiconductor wafer edge by recording the noise created by rubbing the edge with a piece of plastic. Edge roughness on wafers frequently is due to flaws or cracks in the wafer edge. Such flaws reduce the strength of wafers. This detector system locates the flaws quickly, without damaging the wafer, and makes a permanent record of location and approximate magnitude.