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CRISPER/LOT BOX 6276 Disclosure Number: IPCOM000005734D
Original Publication Date: 1988-Oct-01
Included in the Prior Art Database: 2001-Oct-31

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Steve Chapman


With existing lot boxes that open on the top, the chance of particles being put on the wafers is great. Let's follow the steps on inspecting a four inch wafer. I choose the four inch wafer because they are easy to lift out and put back into the conventional boxes with one hand. Also, similar problems exist with different size wafers.