CRISPER/LOT BOX 6279
Original Publication Date: 1988-Oct-01
Included in the Prior Art Database: 2001-Oct-31
With existing lot boxes that open on the top, the chance of particles being put on the wafers is great. Let's follow the steps on inspecting a four inch wafer. I choose the four inch wafer because they are easy to lift out and put back into the conventional boxes with one hand. Also, similar problems exist with different size wafers.