Browse Prior Art Database

WAFER EDGE STRENGTH TESTER

IP.com Disclosure Number: IPCOM000005774D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2001-Nov-05

Publishing Venue

Motorola

Related People

Authors:
George Wayne Hawkins

Abstract

This system passes the edge of a semiconductor wafer under a roller to bend it and records the wafer breakage as a function of load and angle around the wafer.