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ENDCAP FOR DIFFUSION FURNACE

IP.com Disclosure Number: IPCOM000006060D
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2001-Nov-29

Publishing Venue

Motorola

Related People

Authors:
Steve Handy Larry Fuller Ramon Cota

Abstract

Endcaps are commonly used in diffusion furnaces to enhance profiling and back pressure capabilities. Prior art endcaps commonly include a plurality of quartz plates arranged in a tiered formation and connected by quartz rods. A handle is attached io the top quartz plate. When inserting this prior art endcap into the diffusion furnace, the endcap must be perfectly aligned or the blunt edges of the quartz plates hit the sides of the diffusion furnace and often break.