Browse Prior Art Database

VIEWPORT HEATER CHAMBER

IP.com Disclosure Number: IPCOM000006068D
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2001-Nov-29

Publishing Venue

Motorola

Related People

Authors:
Gordon Grivna Howard Kirshler

Abstract

During the processing of materials inside vacuum chambers, the reacting or evaporating species/gases tend to accumulate on reactor walls. To limit this buildup and for tighter process control, reactor walls are usually heated. The warm chamber walls reduce the sticking coefficient of the condensates and reduce the buildup on the chamber walls. Viewports or other non-thermally conductive parts of the chamber wall buildup condensates at a faster rate than the heated section of the chamber. This is especially a problem in areas where high vacuum applications do not allow cleaning of the viewport and the interior and exterior of the viewport is at a reduced temperature in comparison to the reaction by-products. To reduce this buildup a Viewport Heater Chamber was developed.