WALKING BEAM DUAL SIZE BOAT HOLDER
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2001-Dec-03
MOS 5 started up in 1978 as a 4 inch wafer fab area. The fluorocarbon 4002 "walking beam" acid processors purchased at start up were capable of running two 4 inch cassettes or one 5 inch cassette (see addendum). In 1989 MOS 5 began converting its production capability to 5 inch wafers. Production requested that the "walking beam" hoods be able to run two 5 inch cassettes so that no capacity was lost by the conversion.