AN IMPROVED ROLLER FOR THE SILICON VALLEY GROUP DOUBLE SIDED SILICON WAFER SCRUBBER
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2001-Dec-04
The Silicon Valley Group Scrubber contains two cylindrical revolving rollers: one with a bristle brush and the other with an adhesive backed strip of Rode1 205 Polish Pad material (0.625" wide) spirally attached, from end to end. The wafer to he cleaned is fed horizontally between the rollers while the deionized water and ammonia are dispensed to the roller and onto the pad. The strips or pads have to be replaced periodically. During the replacement procedure the following problems were noticed.