Browse Prior Art Database

Optimization Technique for Lithography and Etch Processes on Device Shrinks

IP.com Disclosure Number: IPCOM000006139D
Original Publication Date: 2001-Dec-06
Included in the Prior Art Database: 2001-Dec-06

Publishing Venue

Motorola

Related People

Authors:
Karl Mautz Alain Charles John Maltabes

Abstract

Optimization Technique for Lithography and Etch Processes on Device Shrinks