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Optimization Technique for Lithography and Etch Processes on Device Shrinks

IP.com Disclosure Number: IPCOM000006139D
Original Publication Date: 2001-Dec-06
Included in the Prior Art Database: 2001-Dec-06
Document File: 2 page(s) / 22K

Publishing Venue

Motorola

Related People

Authors:
Karl Mautz Alain Charles John Maltabes

Abstract

Optimization Technique for Lithography and Etch Processes on Device Shrinks