Browse Prior Art Database

Attenuated Phase Shift Mask Method

IP.com Disclosure Number: IPCOM000006142D
Original Publication Date: 2001-Dec-06
Included in the Prior Art Database: 2001-Dec-06
Document File: 1 page(s) / 21K

Publishing Venue

Motorola

Related People

Authors:
Karl Mautz John Maltabes

Abstract

Attenuated Phase Shift Mask Method