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UNIVERSAL ALIGNMENT BASE FOR WAFER TRANSFER CASSETTE

IP.com Disclosure Number: IPCOM000006171D
Original Publication Date: 1991-Jul-01
Included in the Prior Art Database: 2001-Dec-11

Publishing Venue

Motorola

Related People

Authors:
Josephine Harbarger Frank Patrick

Abstract

A carrier for Silicon wafers that is used as a magazine to store, transport or process wafers through semi-automatic processing equipment is commonly termed a "cassette". A cassette can hold many wafers, e.g., 20 to 50 at one time. During normal wafer processing, wafers frequently need to be transferred from one cassette (e.g., full of wafers) to another say cleaner cassette, or one made of a different material (e.g., an empty cassette). Most wafer transfer mechanisms use a pneumatic pusher or arm to actually move the individual wafers between cassettes.