UNIVERSAL ALIGNMENT BASE FOR WAFER TRANSFER CASSETTE
Original Publication Date: 1991-Jul-01
Included in the Prior Art Database: 2001-Dec-11
A carrier for Silicon wafers that is used as a magazine to store, transport or process wafers through semi-automatic processing equipment is commonly termed a "cassette". A cassette can hold many wafers, e.g., 20 to 50 at one time. During normal wafer processing, wafers frequently need to be transferred from one cassette (e.g., full of wafers) to another say cleaner cassette, or one made of a different material (e.g., an empty cassette). Most wafer transfer mechanisms use a pneumatic pusher or arm to actually move the individual wafers between cassettes.