Browse Prior Art Database

20:1, H202:HF DELINEATION ETCH

IP.com Disclosure Number: IPCOM000006192D
Original Publication Date: 1991-Jul-01
Included in the Prior Art Database: 2001-Dec-12
Document File: 2 page(s) / 79K

Publishing Venue

Motorola

Related People

Authors:
Larry Rice

Abstract

Cross sectioned device junctions with TiW metal etch out of proportion when traditional etches are used or yield a graded junction making accurate depth mea- surements impossible.