ON-CHIP CAPACITANCE MEASUREMENT METHOD
Original Publication Date: 1991-Jul-01
Included in the Prior Art Database: 2001-Dec-17
The method, and the associated circuitry described below can be used for measurements of small on-chip capacitances. The value Cut of the Capacitor Under Test (CUT) is converted into DC current by the on- chip circuitry. The measurement of the current is then performed off-chip, and does not require clean AC environment. Therefore, the method can be used in Lab setups, probe, and final test. The area of applica- tion includes Lab characterizations, monitoring of the process parameters, trimming of RC constants (mea- sure C, trim R), etc. Accuracy of the procedure depends upon available accuracies for measurements of voltage and current, and upon the technology used to process the chip.