VACUUM WAND LATTICE BOAT
Original Publication Date: 1991-Dec-01
Included in the Prior Art Database: 2001-Dec-19
The "Vacuum Wand Lattice Boat" is a quartz lattice structure designed for vacuum wand usage in the spike- emitter anneal processes (wafers lay tlat on the lattice boat and are annealed horizontally), it sits on a quartz frame resting on the diffusion cantilever. This dil?usion furnace boat provides an opening or a space for the backsides of wafers to be handled with a vacuum wand. This structure can also be used for any anneal process in which wafers are annealed horizontally and are loaded and unloaded with tweezers or vacuum wands. The capacity for each run is five four-inch wafers. The Vacuum Wand Lattice Boat is used in a clean room environment and is normally ran in an atmospheric diision tube.