ORGANIC SPACER TECHNOLOGY
Original Publication Date: 1992-May-01
Included in the Prior Art Database: 2001-Dec-31
Sidewall spacer technology is well known in the semi- conductor art and typically employs inorganic confor- mal layers from which spacers are formed. Spacers are commonly used in lightly doped drain (LDD) and tine geometry applications. Although respectable selectivity may be obtained using common inorganic materials such as polysilicon, oxides and nitrides, the underlying semi- conductor tilms are often damaged and improvements in spacer technology are necessary.