TECHNIQUE FOR PLAN-VIEW LAYER-SPECIFIC TEM SPECIMEN-PREPARATION
Original Publication Date: 1992-Aug-01
Included in the Prior Art Database: 2002-Jan-09
Transmission electron microscopy ITEM] is an ana- lytical technique that involves propagation of electron beams through a thin foil of material. The transmitted beams contain information that make possible the anal- ysis and study of(i) microstructure of device-structures, semiconductor, metal, or insulating layers, (ii) continu- ity of layers, including the presence of pin-holes or islanding, (iii) quality of interfaces, (iv) material interac- tions such as phase-reactions, corrosion, action of diffi- sion barriers and glue layers in device-structures, (v) defects such as dislocations, grain-boundaries, twins, pre- cipitates, stacking faults in materials. For plan-view TEM [REM) analysis, thin-foil specimens (-10-500 nm thick) have to be prepared in plan-view, from the materials of interest; the resulting foils have to be electron transparent.