TRANSMISSION ELECTRON MICROSCOPY OF SURFACE FEATURES
Original Publication Date: 1992-Aug-01
Included in the Prior Art Database: 2002-Jan-16
Transmission electron microscopy (TEM) is a tech- nique used for analyzing the microstructures of semi- conductors, device-structures, metals, and insulating layers. An electron beam is incident upon a thin foil of specimen-material. Electron beams transmitted or diffracted through the thin-foil provide high-resolution information about the material and its microstructure. The technique requires plan-view TEM specimens that consist of thin electron-transparent foils -10-500 nm thick.