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TRANSMISSION ELECTRON MICROSCOPY OF SURFACE FEATURES

IP.com Disclosure Number: IPCOM000006576D
Original Publication Date: 1992-Aug-01
Included in the Prior Art Database: 2002-Jan-16
Document File: 2 page(s) / 222K

Publishing Venue

Motorola

Related People

Authors:
N. David Theodore

Abstract

Transmission electron microscopy (TEM) is a tech- nique used for analyzing the microstructures of semi- conductors, device-structures, metals, and insulating layers. An electron beam is incident upon a thin foil of specimen-material. Electron beams transmitted or diffracted through the thin-foil provide high-resolution information about the material and its microstructure. The technique requires plan-view TEM specimens that consist of thin electron-transparent foils -10-500 nm thick.