Tool for Accurately Checking Belt Tension on Sputtering Machines
Publication Date: 2002-Jan-16
The IP.com Prior Art Database
Disclosed is a tool for checking the belt tension of lift mechanisms for certain metal-sputtering machines. The disclosed tool (shown in FIG. 1 and FIG. 2) is manually placed against the drive belt of the lift mechanism of a sputtering machines process chamber. The disclosed tool then provides an accurate, precise method for determining both insertion force and belt tension.