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Tool for Accurately Checking Belt Tension on Sputtering Machines

IP.com Disclosure Number: IPCOM000006594D
Publication Date: 2002-Jan-16
Document File: 2 page(s) / 25K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a tool for checking the belt tension of lift mechanisms for certain metal-sputtering machines. The disclosed tool (shown in FIG. 1 and FIG. 2) is manually placed against the drive belt of the lift mechanism of a sputtering machines process chamber. The disclosed tool then provides an accurate, precise method for determining both insertion force and belt tension.