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VACUUM FITTING MODIFICATION INCREASES SAFETY LEVEL IN LPCVD SYSTEMS AND REDUCES EXPENSIVE DOWNTIME

IP.com Disclosure Number: IPCOM000006625D
Original Publication Date: 1992-Aug-01
Included in the Prior Art Database: 2002-Jan-17

Publishing Venue

Motorola

Related People

Authors:
Tim Warfield Emmett Howard

Abstract

The addition of a stainless steel ring to a commonly- used gas fitting increases the safety of the use of these fittings in hazardous gas applications in LPCVD processes.