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Oxidation of Deposited Anti-Reflective Coating in Order to Prevent Resist Poisoning

IP.com Disclosure Number: IPCOM000006697D
Original Publication Date: 2002-Jan-23
Included in the Prior Art Database: 2002-Jan-23

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Lionel Riviere-Cazaux


A deposited Anti Reflective Coating (DARC) can react with an overlying photoresist. This problem is known as resist poisoning. A process described herein creates a blocking layer between the DARC and the photoresist. This blocking layer prevents the resist poisoning and does not affect the optical properties of the DARC.