Browse Prior Art Database

INTEGRATED MEDIA ISOLATED CAPACITATIVE PRESSURE SENSOR

IP.com Disclosure Number: IPCOM000006787D
Original Publication Date: 1993-Mar-01
Included in the Prior Art Database: 2002-Feb-01

Publishing Venue

Motorola

Related People

Authors:
Anita Brandes Steven Chen Carl Ross Roseann Tomasello Ruta Venclovas

Abstract

Automotive and industrial customers require smaller packaged pressure sensors that will not be affected by their working environment. This invention integrates the electronics on one surface of a capacitative pressure sen- sor while isolating this surface from the environment. Potential applications where pressure sensing can be improved by immersing the diaphragm of a capacitive. pressure sensor in the media of interest include monitoring oil, gasoline and hydraulic fluid. Silicon and glass are the only materials directly exposed to the envi- ronment that is being monitored.