INTEGRATED MEDIA ISOLATED CAPACITATIVE PRESSURE SENSOR
Original Publication Date: 1993-Mar-01
Included in the Prior Art Database: 2002-Feb-01
Automotive and industrial customers require smaller packaged pressure sensors that will not be affected by their working environment. This invention integrates the electronics on one surface of a capacitative pressure sen- sor while isolating this surface from the environment. Potential applications where pressure sensing can be improved by immersing the diaphragm of a capacitive. pressure sensor in the media of interest include monitoring oil, gasoline and hydraulic fluid. Silicon and glass are the only materials directly exposed to the envi- ronment that is being monitored.