SINGLE POINT ANODIC BONDING PROCESS FOR X-RAY MASKS
Original Publication Date: 1993-Mar-01
Included in the Prior Art Database: 2002-Feb-05
The image placement distortion of an x-ray mask can be a significant component of the overlay error budget. For the largest process latitude in manufactur- ing, it is important to minimize mask distortions. One of the most important sources of distortion in x-ray masks comes from mask tiring when the mask is clamped in the stepper for alignment and exposure. The purpose of this note is to document a mask fabrication, method that minimizes this error component.