MINIATURE AUGER SAMPLE PROBE MANIPULATOR
Original Publication Date: 1993-Oct-01
Included in the Prior Art Database: 2002-Feb-22
Auger electron spectroscopy (AES) is a surface analysis technique. To perform AES a solid sample is placed in an ultra-high vacuum (UHV) chamber (Z 10-9 torr), irradiated with an electron beam and the emitted electrons are collected and counted as a function of energy, One type of emitted electron is the Auger electron which is emitted at an energy characteristic ofthe atom from which it was emitted.