Browse Prior Art Database

MINIATURE AUGER SAMPLE PROBE MANIPULATOR

IP.com Disclosure Number: IPCOM000007066D
Original Publication Date: 1993-Oct-01
Included in the Prior Art Database: 2002-Feb-22

Publishing Venue

Motorola

Related People

Authors:
Bridget Rogers Darryl Burns James LaCroix

Abstract

Auger electron spectroscopy (AES) is a surface analysis technique. To perform AES a solid sample is placed in an ultra-high vacuum (UHV) chamber (Z 10-9 torr), irradiated with an electron beam and the emitted electrons are collected and counted as a function of energy, One type of emitted electron is the Auger electron which is emitted at an energy characteristic ofthe atom from which it was emitted.