RETRACTABLE VACUUM WAND ASSEMBLY
Original Publication Date: 1994-Feb-01
Included in the Prior Art Database: 2002-Feb-25
The Retractable Wand is for wafer recovery or wafer placement. This new type of wand will elimi- nate any pick and place marks that are currently induced from existing wands. It will improve the quality by eliminating reject wand marks on the backs of wafers.